EDX-7000/8100 - Features

Large Sample Chamber with Small Footprint

Installed width is 20% smaller than the previous instrument due to its compact body size. The EDX-8100 can accommodate samples up to a maximum size of W300 x D275 x approx. H100 mm.

High-Visibility LED Lamp

When X-rays are generated, an X-ray indicator at the rear of the instrument and an X-RAYS ON lamp at the front turn on, so that the instrument status can be monitored even from a distance.

The high-performance SDD detector and optimized hardware achieve a high level of sensitivity, analysis speed, and energy resolution that were previously unattainable. The EDX-8100 system also permits detection from ₆C.

High Sensitivity − Lower Limit of Detection Improved 1.5 to 5 Times! −

The high-performance SDD detector and combination of optimized optics and primary filters achieve previously unheard-of high levels of sensitivity. The sensitivity is higher than the previous Si (Li) semiconductor detector across the entire range from light to heavy elements.

High Speed − Throughput Increased by up to a Factor of 10 −

The high fluorescent X-ray count per unit time (high count rate) of the SDD detector permits highly precise analysis in a shorter measurement time. This feature is achieved to the maximum when analyzing samples that generate a lot of fluorescent X-rays, such as samples with a metal as the Main component element.

High Resolution

The EDX-8100 instruments achieve superior energy resolution compared to previous models by incorporating a state-of-the-art SDD detector.

This reduces the effects of overlapping peaks of different elements, enhancing the reliability of the analysis results.

No Liquid Nitrogen Required

The high fluorescent X-ray count per unit time (high count rate) of the SDD detector permits highly precise analysis in a shorter measurement time. This feature is achieved to the maximum when analyzing samples that generate a lot of fluorescent X-rays, such as samples with a metal as the Main component element.

Range of Detected Elements

• An optional vacuum measurement unit or helium purge unit is required to measure light elements (₁₅P and below) with the EDX-8100.
• An optional vacuum measurement unit is required to measure light elements (₁₅P and below) with the EDX-8100.
• Lower detection limit vary depending on the sample matrix or coexisting elements.
• Lower detection limit of light element (₂₀Ca and below) get worse when the sample cell film is used.
• It is impossible to measure ₈O and below with sample cell film.

Ultra-Light Element Analysis by EDX-8100

Profile of Fluorine (F) by EDX-8100

The EDX-8100 features an SDD detector with a special ultra-thin-film window material that is able to detect ultra-light elements such as carbon (C), oxygen (O), and fluorine (F)

Accommodates all types of samples from small to large, from powders to liquids. Options include a vacuum measurement unit and helium purge unit for highly sensitive measurement of light elements and a 12-sample turret for automated continuous measurements.

Sample Observation Camera and Collimators

Automatic collimator switching in four stages: 1, 3, 5, and 10 mm diameter

Select the irradiation chamber from four values to suit the sample size.

Select the most appropriate irradiation diameter for the sample shape: 1 mm diameter for trace foreign matter analysis or defect analysis; 3 mm or 5 mm diameter for small sample volumes.

Sample observation camera included standard

Use the sample observation camera to confirm the X-ray irradiation position on a specific position to measure small samples, samples comprising multiple areas, or when using a Micro X-Cell.

Automatic Replacement of Five Primary Filters

Primary filters enhance detection sensitivity by reducing the continuous X-rays and the characteristic X-rays from the X-ray tube. They are useful for the analysis of trace elements.

The EDX-8100 incorporates five primary filters as standard (six, including the open position), which can be automatically changed using the software.

Freely Combine Collimators and Primary Filters

The collimators and primary filters are driven independently and can be combined to address specific requirements. Select the optimal combination from 24 (6 filters x 4 collimators) available options. Quantitative analysis using the FP method is possible with all combinations.

Optional Vacuum Measurement Unit and Helium Purge Unit

Sensitivity for light elements can be increased by removing atmosphere. Two options are available: a vacuum measurement unit and a helium purge unit. The helium purge unit is effective when measuring liquid samples and samples that generate a gas and cannot be measured in a vacuum.

Advanced Helium Purge Unit (Option)

This proprietary system (Japanese Patent No. 5962855) efficiently purges the instrument with helium gas to achieve an approximately 40 % reduction in purge time and helium gas consumption compared to previous units. (Option for EDX-8100)

Profile Comparison in Air and Helium After Purging
(EDX-7000 / sample: sulfur in oil)

Profile Comparison in Air and Helium After Purging
(EDX-8100 / sample: fluorine in fluorine coating agent)

12-Sample Turret (Option)

The addition of the turret allows automated continuous measurements. It improves throughput, especially for measurements in a vacuum or helium atmosphere.

Calibration Curve Method

A standard sample is measured and the relationship with the fluorescent X-ray intensity plotted as a calibration curve, which is used for the quantitation of unknown samples.

Although this method requires selection of a standard sample close to the unknown sample and creation of a calibration curve for each element, it achieves a high level of analysis accuracy.

This method supports all types of corrections for coexistent elements, including absorption/excitation correction and correction for overlapping elements.

Fundamental Parameter (FP) Method

This method uses theoretical intensity calculations to determine the composition from the measured intensities. It's a powerful tool for the quantitative analysis of unknown samples in cases where preparation of a standard sample is difficult. (JP No. 03921872, DE No. 60042990. 3-08, GB No. 1054254, US No. 6314158)

Automatic Balance Setting Function (Patent pending)

A balance setting is required to use the FP method on principal components such as C, H, and O. The software automatically sets the balance if it determines from the profile shape that a balance setting is required.

Film FP Method

The instrument also offers the thin-film FP method function. The film FP method permits the film thickness measurement of multilayer films, and simultaneous film thickness measurements and quantitative film composition. When using the film FP method, the substrate material, deposition sequence, and element information can be set.

Background FP Method

The background FP method adds scattered X-ray (background) calculations to the conventional FP method, which only calculates the fluorescent X-ray peak intensity (net peak intensity). (Patent pending: Japanese Patent No. 5975181)

This method is effective at improving quantitation accuracy for small quantities of organic samples, film thickness measurements of irregular-shaped plated samples, and film thickness measurements of organic films.

Matching Function

Matching Results

The matching function compares analysis data for a sample with an existing data library and displays the results in descending degree of confidence. The library contains content data and intensity data and the user can register each type. The content data values can be entered manually.

Easy Instrument Startup

PCEDX Navi offers instrument initialization and startup (X-ray startup) with simple mouse-click operations.

After instrument startup, the stabilization function operates for 15 minutes. Analysis and instrument checks are disabled during this period, ensuring that all users collect data in a stable instrument environment.

Automatic X-ray Tube Aging

When an X-ray tube has not been used for a long period, it requires aging before it can be used again. The software automatically performs the appropriate aging according to the period of non-use.

Condition Password Protection

The software offers password protection. Condition settings and changes can only be made by a person who enters the password.

Incorporates General Analysis Software

EDX-8100 incorporates PCEDX Pro software that has more flexibility functions. This software offers analysis, conditions settings, and data processing using familiar operations. It also allows loading of data profiles and quantitation values acquired with a previous Shimadzu EDX series instrument.

Report Creation Functions

Analysis data reports can be created in HTML or Excel format. A variety of templates is available. The sample image automatically saved when measurement started is pasted in the report for confirmation of the measurement position.

List Creation Functions

Lists of the analysis results for multiple samples can be created in Excel format. Data can be selected in the list for detailed display or editing. A variety of list generation templates is available, including a list of RoHS specific hazardous elements and user-defined lists of elements.